Tag: ALEt

Plasma Technology, Technology

Atomic Scale Processing

Atomic Scale Processing cluster tool diagram

‘I, a universe of atoms, an atom in the universe’ Richard P. Feynman Everything we do involves the manipulation of atoms so what’s the big deal about Atomic Scale Processing? It is the creation or removal of material one atomic layer at a time that’s what, which I still find amazing. Consider a human hair, …

Processes

Atomic Layer Etching – Changing the Art of the Possible

The society of vacuum coaters (SVC) deserves to be better known. It was founded in 1957 during a surge in the use of vacuum coating techniques such as sputtering and evaporation. The techniques go back a very long way: that man Edison filed a patent for coating phonograph cylinders in 1892 (It will never catch …